Table 2

Structural parameters of S1 and S2 samples obtained from the XRD and AFM data
Sample tGaN/tAlN(nm) Rcurv.(m) Npin.(×108cm−2) Ncr.(×103cm−1) Lter.(nm)
Nominal Actual
S1 1.98/1.98 1.70 ± 0.07/2.30 ± 0.06 4 0.86 1.5 300
S2 1.98/1.98 1.50 ± 0.04/2.50 ± 0.05 10 1.8 None 900

Kladko et al.

Kladko et al. Nanoscale Research Letters 2012 7:289   doi:10.1186/1556-276X-7-289

Open Data