Table 1

Structural parameters for layers of S1 and S2 samples, obtained from RSMs
Sample S1 S2
GaNtempl./buf. SL GaNcap AlNtempl. SL GaNbuf./cap
Dlateral (nm) 700 ± 20 180 ± 28 208 ± 8 130 ± 10 171 ± 10 198 ± 20
<a onClick="popup('http://www.nanoscalereslett.com/content/7/1/289/mathml/M10','MathML',630,470);return false;" target="_blank" href="http://www.nanoscalereslett.com/content/7/1/289/mathml/M10">View MathML</a> (degrees) 0.028 ± 0.003 0.121 ± 0.05 0.083 ± 0.014 0.148 ± 0.014 0.115 ± 0.005 0.101 ± 0.011
Nscrew (cm2) 2.3 × 107 3.8 × 108 1.9 × 108 5.7 × 108 3.4 × 108 2.7 × 108

Kladko et al.

Kladko et al. Nanoscale Research Letters 2012 7:289   doi:10.1186/1556-276X-7-289

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