Table 1
Structural parameters for layers of S1 and S2 samples, obtained from RSMs
Sample	S1			S2
	GaNtempl./buf.	SL	GaNcap	AlNtempl.	SL	GaNbuf./cap
Dlateral (nm)	700 ± 20	180 ± 28	208 ± 8	130 ± 10	171 ± 10	198 ± 20
(degrees)	0.028 ± 0.003	0.121 ± 0.05	0.083 ± 0.014	0.148 ± 0.014	0.115 ± 0.005	0.101 ± 0.011
Nscrew (cm2)	2.3 × 107	3.8 × 108	1.9 × 108	5.7 × 108	3.4 × 108	2.7 × 108

Kladko et al. Nanoscale Research Letters 2012 7:289   doi:10.1186/1556-276X-7-289