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Short-wavelength light beam in situ monitoring growth of InGaN/GaN green LEDs by MOCVD

Xiaojuan Sun12, Dabing Li1*, Hang Song1*, Yiren Chen12, Hong Jiang1, Guoqing Miao1 and Zhiming Li1

Author affiliations

1 State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 3888 Dongnanhu Road, Changchun, 130033, Peoples' Republic of China

2 Graduate University of the Chinese Academy of Sciences, Beijing, 100039, Peoples' Republic of China

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Citation and License

Nanoscale Research Letters 2012, 7:282  doi:10.1186/1556-276X-7-282

Published: 31 May 2012


In this paper, five-period InGaN/GaN multiple quantum well green light-emitting diodes (LEDs) were grown by metal organic chemical vapor deposition with 405-nm light beam in situ monitoring system. Based on the signal of 405-nm in situ monitoring system, the related information of growth rate, indium composition and interfacial quality of each InGaN/GaN QW were obtained, and thus, the growth conditions and structural parameters were optimized to grow high-quality InGaN/GaN green LED structure. Finally, a green LED with a wavelength of 509 nm was fabricated under the optimal parameters, which was also proved by ex situ characterization such as high-resolution X-ray diffraction, photoluminescence, and electroluminescence. The results demonstrated that short-wavelength in situ monitoring system was a quick and non-destroyed tool to provide the growth information on InGaN/GaN, which would accelerate the research and development of GaN-based green LEDs.

InGaN/GaN; Green LED; MOCVD; in situ monitoring