Table 1

Relationship of dielectric properties with substrate type and thickness of BaTiO3films (at 1 MHz)
Film thickness (μm) ~0.1 0.2 0.4 0.5 0.8 1.0~
Cu substrate ϵr N/A N/A N/A 60 69 >71
tan δ (%) N/A N/A N/A 1.9 1.7 <1
Capacitance density (nF/cm2) N/A N/A N/A 106 76 63<
Dielectric behavior (%) 0 0 0 50 to 80 50 to 80 90 to 100
SUS substrate ϵr N/A 59 63 61 60 >65
tan δ (%) N/A 2.1 1.9 1.7 2.3 <1.5
Capacitance density (nF/cm2) N/A 261 139 108 66 <50
Dielectric behavior (%) 0 90 to 100 90 to 100 90 to 100 90 to 100 90 to 100

Kim et al.

Kim et al. Nanoscale Research Letters 2012 7:264   doi:10.1186/1556-276X-7-264

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