Figure 1.

The fabrication processes of ZnO/Si nanopillar heterostructures (not to scale). ( a) Size distribution of Ag islands. ( b) Dry etching process. ( c) Formation of Si nanopillars. ( d) Deposition of ZnO films on the Si nanopillar surface by ALD.

Chiang and Dai Nanoscale Research Letters 2012 7:263   doi:10.1186/1556-276X-7-263
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