Table 1

Deposition conditions of composite thick films fabricated by the AD process
Deposition parameter Value
Consumption of carrier gas 1 to 10 L/min
Scanning speed of the nozzle motion 1 mm/s
Working pressure 5 to 20 Torr
Size of nozzle orifice 10 mm × 0.4 mm
Distance between substrate and nozzle 5 to 15 mm
Deposition temperature Room temperature
Deposition time 10 to 30 min
Deposition area 10 mm × 20 mm

Kwon et al.

Kwon et al. Nanoscale Research Letters 2012 7:261   doi:10.1186/1556-276X-7-261

Open Data