Table 1 |
|
| Deposition conditions of composite thick films fabricated by the AD process | |
| Deposition parameter | Value |
| Consumption of carrier gas | 1 to 10 L/min |
| Scanning speed of the nozzle motion | 1 mm/s |
| Working pressure | 5 to 20 Torr |
| Size of nozzle orifice | 10 mm × 0.4 mm |
| Distance between substrate and nozzle | 5 to 15 mm |
| Deposition temperature | Room temperature |
| Deposition time | 10 to 30 min |
| Deposition area | 10 mm × 20 mm |
Kwon et al. Nanoscale Research Letters 2012 7:261 doi:10.1186/1556-276X-7-261