Properties of the LZO films. (a) The optical band gap and lithium quantity and (b) the RMS roughness and electrical resistivity in the LZO films. Open triangles denote the dopant quantities in the MZO films, while solid triangles, the dopant amounts in the MZO ceramic targets. Open circles denote the RMS roughness, and solid circles, the electrical resistivity.
Nam et al. Nanoscale Research Letters 2012 7:25 doi:10.1186/1556-276X-7-25