Table 2
Widths of gold signal calculated as central second moment of measured distribution (see Figure4)
Sputtering time (s)	Glass substrate		Si substrate
	σ	S	σ	S
	(keV)	(1015at.cm−2)	(keV)	(1015at.cm−2)
5	4.6	53	2.9	34
10	4.8	55	3.0	35
15	3.2	37	3.2	37
20	3.3	38	3.2	37

Typical statistical error is below 10 %.

Malinský et al. Nanoscale Research Letters 2012 7:241   doi:10.1186/1556-276X-7-241