Table 2

Widths of gold signal calculated as central second moment of measured distribution (see Figure4)

Sputtering time

(s)

Glass substrate Si substrate
σ S σ S
(keV) (1015at.cm−2) (keV) (1015at.cm−2)
5 4.6 53 2.9 34
10 4.8 55 3.0 35
15 3.2 37 3.2 37
20 3.3 38 3.2 37

Typical statistical error is below 10 %.

Malinský et al.

Malinský et al. Nanoscale Research Letters 2012 7:241   doi:10.1186/1556-276X-7-241

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