Table 1

Parameters of Equation 2
Substrate j N f
(1015cm−2s−1) (1015cm−2)
Glass 2.00 ± 0.02 59.70 ± 3.0 0.59 ± 0.02
Si 2.16 ± 0.02 28.9 ± 7.5 0.92 ±0.02

Obtained by NLSQ fitting of measured dependences of the mean layer thickness on the deposition time (see Figure 1).

Malinský et al.

Malinský et al. Nanoscale Research Letters 2012 7:241   doi:10.1186/1556-276X-7-241

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