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SiC formation for a solar cell passivation layer using an RF magnetron co-sputtering system

Yeun-Ho Joung, Hyun Il Kang, Jung Hyun Kim, Hae-Seok Lee, Jaehyung Lee and Won Seok Choi*

Nanoscale Research Letters 2012, 7:22  doi:10.1186/1556-276X-7-22