Table 1

Performance of the measurement algorithm

Accuracy

20 nm

3 nm


Grating

18%

34%

Microchip

42%

54%

Solar cell

41%

68%


This table summarizes the total tip path reduction for two different final accuracies (20 and 3 nm). Note that 100% corresponds to the path needed for obtaining the regularly sampled data with the same accuracy.

Klapetek et al. Nanoscale Research Letters 2012 7:213   doi:10.1186/1556-276X-7-213

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