Figure 4.

Local refinement process on different surfaces. Topography of (1) 2D calibration grating, (2) microchip surface and (3) solar cell front surface together with areas where the z precision criterion failed and a refinement needs to be planned (black color) for three successive levels of iterative process (A, B, C).

Klapetek et al. Nanoscale Research Letters 2012 7:213   doi:10.1186/1556-276X-7-213
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