Adaptive measurement process illustration. The graph shows the convergence of the z value of a typical point on a ﬂat sample area (point A) and close to a steep slope (point B) if the iterative reﬁnement process is not stopped by the precision criterion. The precision criterion is used to stop reﬁnements locally as shown in the inset.
Klapetek et al. Nanoscale Research Letters 2012 7:213 doi:10.1186/1556-276X-7-213