Figure 2.
Long-range SPM schematics. (A) xy Motion system (position of three reference plane sensors and actuators shown as well)
and (B) reference plane system schematics (two-dimensional plot, note that in practice the
system has a threefold symmetry as seen from the top view in part A).
Klapetek et al. Nanoscale Research Letters 2012 7:213 doi:10.1186/1556-276X-7-213 |
