Figure 2.

Long-range SPM schematics. (A) xy Motion system (position of three reference plane sensors and actuators shown as well) and (B) reference plane system schematics (two-dimensional plot, note that in practice the system has a threefold symmetry as seen from the top view in part A).

Klapetek et al. Nanoscale Research Letters 2012 7:213   doi:10.1186/1556-276X-7-213
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