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Resolution: standard / high Figure 9.
SEM images of 10-nm Al2O3 particles before and after cleaning using 1:9 CO2/He BPs. SEM images before (a) and after (b-f) cleaning of 10-nm Al2O3 particles on Si surface using 1:9 CO2/He BPs generated with 1/3 throat diameter.
Kim et al. Nanoscale Research Letters 2012 7:211 doi:10.1186/1556-276X-7-211 |
