Figure 7.

SEM images of 10-nm Al2O3 particles before and after cleaning using 1:1 CO2/He BPs. SEM images before (a) and after (b-f) cleaning of 10-nm Al2O3 particles on Si surface using 1:1 CO2/He BPs generated with 1/3 throat diameter.

Kim et al. Nanoscale Research Letters 2012 7:211   doi:10.1186/1556-276X-7-211
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