Figure 12.

SEM images after cleaning of 10-nm Al2O3 particles at different chamber pressures. SEM images after cleaning of 10-nm Al2O3 particles on Si surface using pure CO2 at different chamber pressures (Pc): (a) Pc = 3.7 Torr at 10 bar, (b) Pc = 0.37 Torr at 10 bar, (c) Pc = 8.4 Torr at 30 bar, (d) Pc = 0.84 Torr at 30 bar, (e) Pc = 11 Torr at 50 bar, and (f) Pc = 1.1 Torr at 50 bar.

Kim et al. Nanoscale Research Letters 2012 7:211   doi:10.1186/1556-276X-7-211
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