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Resolution: standard / high Figure 11.
SEM images after cleaning of 10-nm Al2O3 p articles using different ratios of CO2/He mixtures. SEM images after cleaning of 10-nm Al2O3 particles on Si surface using (a) pure CO2 at 5 bar, (b) 1:1 CO2/He at 10 bar, (c) 1:4 CO2/He at 25 bar, and (d) 1:9 CO2/He at 50 bar with 1/3 throat diameter.
Kim et al. Nanoscale Research Letters 2012 7:211 doi:10.1186/1556-276X-7-211 |
