Table 1

Concentration of spots 1 to 13 shown in Figure 4 (at.%)

Spot number

Ti

Al

V

N


1

90.2

0

0

9.8

2

85.5

0

0

14.5

3

79.7

18.6

1.7

0

4

77.6

20.9

1.5

0

5

80.5

18.1

1.4

0

6

85.5

12.4

2.1

0

7

87.3

11.7

1.0

0

8

87.8

10.9

1.3

0

9

88.4

10.3

1.3

0

10

88.8

10.1

1.1

0

11

88.8

9.8

1.4

0

12

88.4

10.2

1.4

0

13

88.8

9.7

1.5

0


Lee et al. Nanoscale Research Letters 2012 7:21   doi:10.1186/1556-276X-7-21

Open Data