Figure 4.

MOS samples, B-doped Si-rich oxide and P-doped Si-rich oxide. MOS samples as shown in (a), with C-V curve fitting for (b) B-doped Si-rich oxide showing accumulation for negative bias and hence p-type behaviour and (c) P-doped Si-rich oxide showing inversion for negative bias and hence n-type behaviour. The calculated curves use an MOS model with p- and n-type material respectively. The clear change of sign shows the opposite carrier type for B and P doping [14].