Figure 2.

Multilayer deposition of alternating Si-rich dielectric and stoichiometric dielectric in layers of a few nanometers. On annealing, the excess Si precipitates out to form small nanocrystals of a size determined by the Si-rich layer thickness. The nanocrystal or quantum dot size is therefore uniform.

Conibeer et al. Nanoscale Research Letters 2012 7:193   doi:10.1186/1556-276X-7-193
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