Multilayer deposition of alternating Si-rich dielectric and stoichiometric dielectric in layers of a few nanometers. On annealing, the excess Si precipitates out to form small nanocrystals of a size determined by the Si-rich layer thickness. The nanocrystal or quantum dot size is therefore uniform.
Conibeer et al. Nanoscale Research Letters 2012 7:193 doi:10.1186/1556-276X-7-193