|
Resolution: standard / high Figure 3.
Yields of the Al/ZrO2/Pt samples deposited at various temperatures. Where the ZrO2 films were deposited at RT, 150°C, 200°C, 250°C, and 300°C. The samples fabricated
at RT show the highest yield.
Lin et al. Nanoscale Research Letters 2012 7:187 doi:10.1186/1556-276X-7-187 |
