Figure 3.

Yields of the Al/ZrO2/Pt samples deposited at various temperatures. Where the ZrO2 films were deposited at RT, 150°C, 200°C, 250°C, and 300°C. The samples fabricated at RT show the highest yield.

Lin et al. Nanoscale Research Letters 2012 7:187   doi:10.1186/1556-276X-7-187
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