pH Sensitivity and linearity characteristics and normalized C-V curves. (a) pH sensitivity and linearity characteristics of the ALD-HfO2-EIS devices with various HfO2 thicknesses. (b) Normalized C-V curves for the ALD-HfO2 and 3.5-nm-thick ALD-HfO2-EIS structure measured at pH 2 to pH 12.
Wang et al. Nanoscale Research Letters 2012 7:179 doi:10.1186/1556-276X-7-179