Figure 1.
Schematics of NH2 molecular and covalent bonding process flow of ALD-HfO2-EIS. (a) NH2 molecular formed after plasma treatment. (b) Covalent bonding process flow of ALD-HfO2-EIS based on sensing membrane.
Wang et al. Nanoscale Research Letters 2012 7:179 doi:10.1186/1556-276X-7-179 |
