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Table 1
Details of the experimental conditions
Variable parameters	Unit	Value	Fixed parameters	Unit	Value

Working pressure	mTorr	5	Sample area	cm²	16 × 34
		7.5
		10
		12.5
		15
			H₂flow rate	sccm	5.2
Bubbler pressure	Torr	40.2	O₂flow rate	sccm	36.4
		43.3
		45.7
		60.6
			TMT flow rate	sccm	3.6
			SF₆flow rate	sccm	12.46
			Ar flow rate	sccm	12.18
			Deposition time	min	15

Hudaya et al. Nanoscale Research Letters 2012 7:17 doi:10.1186/1556-276X-7-17

Table 1