Table 1

Details of the experimental conditions

Variable parameters

Unit

Value

Fixed parameters

Unit

Value


Working pressure

mTorr

5

Sample area

cm2

16 × 34

7.5

10

12.5

15

H2 flow rate

sccm

5.2

Bubbler pressure

Torr

40.2

O2 flow rate

sccm

36.4

43.3

45.7

60.6

TMT flow rate

sccm

3.6

SF6 flow rate

sccm

12.46

Ar flow rate

sccm

12.18

Deposition time

min

15


Hudaya et al. Nanoscale Research Letters 2012 7:17   doi:10.1186/1556-276X-7-17

Open Data