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Open Access Nano Express

Morphology control and optical properties of SiGe nanostructures grown on glass substrate

Hsu-Kai Chang1 and Si-Chen Lee12*

Author Affiliations

1 Graduate Institute of Electronics Engineering, National Taiwan University, Taipei, 10617, Taiwan

2 Department of Electrical Engineering, National Taiwan University, Taipei, 10617, Taiwan

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Nanoscale Research Letters 2012, 7:155  doi:10.1186/1556-276X-7-155

Published: 27 February 2012

Abstract

With the rapid progress of nanotechnology, nanostructures with different morphologies have been realized, which may be very promising to enhance the performance of semiconductor devices. In this study, SiGe nanostructures with several kinds of configurations have been synthesized through a chemical vapor deposition process. By controlling growth conditions, different SiGe nanostructures can be easily tuned. Structures and compositions of the nanostructures were determined by scanning electron microscopy, transmission electron microscopy, and X-ray diffraction. The optical properties of various SiGe nanostructures revealed some dependence with their morphologies, which may be suitable for solar cell applications. The control of the SiGe morphology on nanoscale provides a convenient route to produce diverse SiGe nanostructures and creates new opportunities to realize the integration of future devices.

Keywords:
SiGe; reflectance; nanowire; core-shell; transformation