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Fabrication mechanism of friction-induced selective etching on Si(100) surface

Jian Guo, Chenfei Song, Xiaoying Li, Bingjun Yu, Hanshan Dong, Linmao Qian* and Zhongrong Zhou

Nanoscale Research Letters 2012, 7:152  doi:10.1186/1556-276X-7-152

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