Open Access Nano Express

Formation mechanism of SiGe nanorod arrays by combining nanosphere lithography and Au-assisted chemical etching

Chih-Chung Lai, Yun-Ju Lee, Ping-Hung Yeh* and Sheng-Wei Lee*

Nanoscale Research Letters 2012, 7:140 doi:10.1186/1556-276X-7-140

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