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Open Access Nano Express

Dynamic response of a cracked atomic force microscope cantilever used for nanomachining

Haw-Long Lee and Win-Jin Chang*

Author affiliations

Department of Mechanical Engineering, Kun Shan University, Tainan 71003, Taiwan

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Citation and License

Nanoscale Research Letters 2012, 7:131  doi:10.1186/1556-276X-7-131

Published: 15 February 2012


The vibration behavior of an atomic force microscope [AFM] cantilever with a crack during the nanomachining process is studied. The cantilever is divided into two segments by the crack, and a rotational spring is used to simulate the crack. The two individual governing equations of transverse vibration for the cracked cantilever can be expressed. However, the corresponding boundary conditions are coupled because of the crack interaction. Analytical expressions for the vibration displacement and natural frequency of the cracked cantilever are obtained. In addition, the effects of crack flexibility, crack location, and tip length on the vibration displacement of the cantilever are analyzed. Results show that the crack occurs in the AFM cantilever that can significantly affect its vibration response.

PACS: 07.79.Lh; 62.20.mt; 62.25.Jk

atomic force microscope; cracked cantilever; nanomachining; vibration response1