Figure 1.

XRD spectra of annealed Si-based MLs. (curve 1) SiOx/SiO2 1 h, 1,100°C; (curve 2) SiOx/SiNy 1 h, 1,100°C; (curve 3) SiOx/SiNy 1 min, 1,000°C; and (curve 4) SiOx/SiO2 1 min, 1,000°C.

Nalini et al. Nanoscale Research Letters 2012 7:124   doi:10.1186/1556-276X-7-124
Download authors' original image