Table 1 |
|||
|
Parameters of the self-organized nanochannel arrays |
|||
|
Method |
|||
|
One-step |
Three-step |
Multi-electrolyte |
|
|
|
|||
|
Step |
one |
three |
approximately one |
|
Al thickness |
approximately 2 μm |
approximately 6 μm |
approximately 2 μm |
|
Electrolyte |
H3PO4 |
H3PO4 |
H2C2O4 |
|
Bias voltage |
120 V |
120 V |
50 V |
|
Processing time |
30 min |
90 min |
approximately 30 min |
|
Applied power |
approximately 72 W |
approximately 216 W |
approximately 39 W |
|
Circularity ± Δ |
0.85 ± 0.1 |
0.87 ± 0.05 |
0.87 ± 0.05 |
|
Diameter |
126.5 nm |
122.4 nm |
155.9 nm |
|
Period ± Δ |
203 ± 35 nm |
206 ± 15 nm |
202 ± 20 nm |
|
|
|||
|
The nanochannel arrays were obtained with the one-step, three-step, and multi-electrolyte-step AAO methods. |
|||
|
Chen and Chen Nanoscale Research Letters 2012 7:122 doi:10.1186/1556-276X-7-122 |
|||