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Multi-electrolyte-step anodic aluminum oxide method for the fabrication of self-organized nanochannel arrays

Chun-Ko Chen and Sheng-Hui Chen*

Author Affiliations

Department of Optics and Photonics, National Central University, 300 Chung-Da Rd., Chung-Li, Taoyuan, 320, Taiwan

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Nanoscale Research Letters 2012, 7:122  doi:10.1186/1556-276X-7-122

Published: 14 February 2012


Nanochannel arrays were fabricated by the self-organized multi-electrolyte-step anodic aluminum oxide [AAO] method in this study. The anodization conditions used in the multi-electrolyte-step AAO method included a phosphoric acid solution as the electrolyte and an applied high voltage. There was a change in the phosphoric acid by the oxalic acid solution as the electrolyte and the applied low voltage. This method was used to produce self-organized nanochannel arrays with good regularity and circularity, meaning less power loss and processing time than with the multi-step AAO method.

nanochannel array; multi-electrolyte-step; anodic aluminum oxide