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Scan speed control for tapping mode SPM

Aleksey V Meshtcheryakov1 and Vjacheslav V Meshtcheryakov2

Author affiliations

1 Faculty of Automation and Electronics of the National Nuclear Research University (MEPhI), Moscow, 115409, Russia

2 Department of Physical and Mechanical Properties Research of Federal State Institution, Technological Institute for Superhard and Novel Carbon Materials, Troitsk, 142190, Russia

Citation and License

Nanoscale Research Letters 2012, 7:121  doi:10.1186/1556-276X-7-121

Published: 14 February 2012


In order to increase the imaging speed of a scanning probe microscope in tapping mode, we propose to use a dynamic controller on 'parachuting' regions. Furthermore, we propose to use variable scan speed on 'upward step' regions, with the speed determined by the error signal of the closed-loop control. We offer line traces obtained on a calibration grating with 25-nm step height, using both standard scanning and our scanning method, as experimental evidence.

tapping-mode SPM; scan speed; closed-loop control