Figure 3.

Micro-/nanoscale pits with controlled morphologies on Si and Ge surfaces. The upper row shows the SEM images of triangle-, square- and wirelike pits formed on (a) Si(111), (b) Si(100), and (c) Si(110) surfaces, respectively. SEM images of triangle-, square- and wirelike pits formed on (d) Ge(111), (e) Ge(100), and (f) Ge(110), respectively. Insets show magnified views of individual pits.