Resonant frequency of gold/polycarbonate hybrid nano resonators fabricated on plastics via nano-transfer printing
1 Department of Mechanical Engineering, University of Maryland, College Park, MD 20742, USA
2 MEMS Sensors and Actuators Laboratory (MSAL), Department of Electrical and Computer Engineering, University of Maryland, College Park, MD 20742, USA
3 Institute for Systems Research, University of Maryland, College Park, MD 20742, USA
4 Maryland NanoCenter, University of Maryland, College Park, MD 20742, USA
Nanoscale Research Letters 2011, 6:90 doi:10.1186/1556-276X-6-90Published: 17 January 2011
We report the fabrication of gold/polycarbonate (Au/PC) hybrid nano resonators on plastic substrates through a nano-transfer printing (nTP) technique, and the parametric studies of the resonant frequency of the resulting hybrid nano resonators. nTP is a nanofabrication technique that involves an assembly process by which a printable layer can be transferred from a transfer substrate to a device substrate. In this article, we applied nTP to fabricate Au/PC hybrid nano resonators on a PC substrate. When an AC voltage is applied, the nano resonator can be mechanically excited when the AC frequency reaches the resonant frequency of the nano resonator. We then performed systematic parametric studies to identify the parameters that govern the resonant frequency of the nano resonators, using finite element method. The quantitative results for a wide range of materials and geometries offer vital guidance to design hybrid nano resonators with a tunable resonant frequency in a range of more than three orders of magnitude (e.g., 10 KHz-100 MHz). Such nano resonators could find their potential applications in nano electromechanical devices. Fabricating hybrid nano resonators via nTP further demonstrates nTP as a potential fabrication technique to enable a low-cost and scalable roll-to-roll printing process of nanodevices.