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Fabrication and ultraviolet photoresponse characteristics of ordered SnOx (x ≈ 0.87, 1.45, 2) nanopore films

Changli Li1, Maojun Zheng1*, Xianghu Wang2, Lujun Yao1, Li Ma3 and Wenzhong Shen1

Author Affiliations

1 Laboratory of Condensed Matter Spectroscopy and Opto-Electronic Physics, Department of Physics, Shanghai Jiao Tong University, Shanghai, 200240, People's Republic of China

2 School of Mechanical Engineering, Shanghai Dianji University, Shanghai 200240, People's Republic of China

3 School of Chemistry and Chemical Technology, Shanghai Jiao Tong University Shanghai, 200240, People's Republic of China

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Nanoscale Research Letters 2011, 6:615  doi:10.1186/1556-276X-6-615

Published: 6 December 2011


Based on the porous anodic aluminum oxide templates, ordered SnOx nanopore films (approximately 150 nm thickness) with different x (x ≈ 0.87, 1.45, 2) have been successfully fabricated by direct current magnetron sputtering and oxidizing annealing. Due to the high specific surface area, this ordered nanopore films exhibit a great improvement in recovery time compared to thin films for ultraviolet (UV) detection. Especially, the ordered SnOx nanopore films with lower x reveal higher UV light sensitivity and shorter current recovery time, which was explained by the higher concentration of the oxygen vacancies in this SnOx films. This work presents a potential candidate material for UV light detector.

PACS: 81.15.Cd, 81.40.Ef, 81.70.Jb, 85.60.Gz.

highly ordered tin oxide nanopores films; anodized aluminum oxide(aao); ultraviolet(uv) response; oxygen vacancies