Nanoscale chemical and structural study of Co-based FEBID structures by STEM-EELS and HRTEM
1 Laboratorio de Microscopías Avanzadas (LMA), Instituto de Nanociencia de Aragón (INA), Universidad de Zaragoza, Zaragoza, 50018, Spain
2 Departamento de Física de la Materia Condensada, Universidad de Zaragoza, Facultad de Ciencias, Zaragoza, 50009, Spain
3 STEM Group-Laboratoire de Physique des Solides (CNRS-UMR 8502), Université Paris-Sud, Bat. 510, Orsay Cedex, 91405, France
4 Fundación ARAID, Zaragoza, 50004, Spain
5 Instituto de Ciencia de Materiales de Aragón (ICMA), CSIC-Universidad de Zaragoza, Facultad de Ciencias, Zaragoza, 50009, Spain
Nanoscale Research Letters 2011, 6:592 doi:10.1186/1556-276X-6-592Published: 15 November 2011
Nanolithography techniques in a scanning electron microscope/focused ion beam are very attractive tools for a number of synthetic processes, including the fabrication of ferromagnetic nano-objects, with potential applications in magnetic storage or magnetic sensing. One of the most versatile techniques is the focused electron beam induced deposition, an efficient method for the production of magnetic structures highly resolved at the nanometric scale. In this work, this method has been applied to the controlled growth of magnetic nanostructures using Co2(CO)8. The chemical and structural properties of these deposits have been studied by electron energy loss spectroscopy and high-resolution transmission electron microscopy at the nanometric scale. The obtained results allow us to correlate the chemical and structural properties with the functionality of these magnetic nanostructures.