Figure 4.

Scanning electron microscopy (SEM) image of (a) cross-sectional view of the light emitting diode (LED) that was grown on the patterned sapphire substrate; SEM image of surface of the LED device after the reactive ion etching process in the (b) top view and (c) tilt view.

Cho et al. Nanoscale Research Letters 2011 6:578   doi:10.1186/1556-276X-6-578
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