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Resolution: standard / high Figure 2.
Three-dimensional atomic force microscopy image (inset is a 2 dimensional image) of
a micro- and nanoscale complex structure of (a) the N-faced GaN surface, (b) replicated polydimethylsiloxane stamp, and (c) surface of light-emitting diode device after the nanoimprint lithography process.
Cho et al. Nanoscale Research Letters 2011 6:578 doi:10.1186/1556-276X-6-578 |
