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STEM nanoanalysis of Au/Pt/Ti-Si3N4 interfacial defects and reactions during local stress of SiGe HBTs

Ali Alaeddine*, Cécile Genevois, Laurence Chevalier and Kaouther Daoud

Nanoscale Research Letters 2011, 6:574  doi:10.1186/1556-276X-6-574

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