Nano Express

STEM nanoanalysis of Au/Pt/Ti-Si₃N₄interfacial defects and reactions during local stress of SiGe HBTs

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Ali Alaeddine^*^†, Cécile Genevois^†, Laurence Chevalier^† and Kaouther Daoud^†

Nanoscale Research Letters 2011, 6:574 doi:10.1186/1556-276X-6-574

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