Optical Performance of FIB patterned LED. (a) LED emission intensity as a function of the FIB exposure dose. (b) Optical image of the LED patterned with box mills of different 30 kV FIB doses. LEDs used for milling have been provided by OSRAM Opto-Semiconductors.
Einsle et al. Nanoscale Research Letters 2011 6:572 doi:10.1186/1556-276X-6-572