Figure 9.

Optical properties and grain structure of 20-nm- and 200-nm-thick ZnO films. (a) Optical transmittance of 25 samples of 200-nm-thick ZnO film deposited on borosilicate glass slides. (b) Optical transmittance of 20-nm- and 200-nm-thick ZnO films deposited on 1.6-mm-thick fused quartz wafers. (inset) Clockwise from top: 1, 000-nm-, 200-nm-, and 20-nm-thick ZnO films on fused quartz. SEM images of (c) 20-nm- and (d) 200-nm-thick ZnO films deposited on fused quartz.