Figure 5.

The harmonic response of the three different length self-actuating piezoelectric cantilevers. The inset SEM photograph shows flat cantilever arrays. The length of the cantilevers were 200, 400, and 600 μm with a 2.05-μm thickness.

Lee et al. Nanoscale Res Lett 2011 6:55   doi:10.1007/s11671-010-9810-z