|
Resolution: standard / high Figure 4.
The process flow chart for the formation of the piezoelectric microcantilevers.
Lee et al. Nanoscale Res Lett 2011 6:55 doi:10.1007/s11671-010-9810-z |
|
Resolution: standard / high Figure 4.
The process flow chart for the formation of the piezoelectric microcantilevers.
Lee et al. Nanoscale Res Lett 2011 6:55 doi:10.1007/s11671-010-9810-z |
