Table 1

AFM features (roughness and height of textured ALD-ZnO films)

Cycles

Mean roughness (nm)

Mean height (nm)

400

3.2

18.18

800

5.5

19.25

1,200

8.1

20.73

1,800

12

31.41

Solís-Pomar et al. Nanoscale Research Letters 2011 6:524   doi:10.1186/1556-276X-6-524