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Translation and manipulation of silicon nanomembranes using holographic optical tweezers

Stefan M Oehrlein, Jose R Sanchez-Perez, RB Jacobson, Frank S Flack, Ryan J Kershner and Max G Lagally*

Author Affiliations

University of Wisconsin, Madison, WI 53706, USA

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Nanoscale Research Letters 2011, 6:507  doi:10.1186/1556-276X-6-507

Published: 25 August 2011


We demonstrate the use of holographic optical tweezers for trapping and manipulating silicon nanomembranes. These macroscopic free-standing sheets of single-crystalline silicon are attractive for use in next-generation flexible electronics. We achieve three-dimensional control by attaching a functionalized silica bead to the silicon surface, enabling non-contact trapping and manipulation of planar structures with high aspect ratios (high lateral size to thickness). Using as few as one trap and trapping powers as low as several hundred milliwatts, silicon nanomembranes can be rotated and translated in a solution over large distances.

optical trapping; silicon nanomembrane; nanofabrication; directed assembly