Open Access Nano Express

Self-assembled monolayer of designed and synthesized triazinedithiolsilane molecule as interfacial adhesion enhancer for integrated circuit

Fang Wang*, Yanni Li, Yabin Wang and Zhuo Cao

Author Affiliations

College of Science, Northwest Agriculture and Forest University, Xi Nong Road No. 22, Yangling, Shaanxi 712100, China

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Nanoscale Research Letters 2011, 6:483  doi:10.1186/1556-276X-6-483

Published: 3 August 2011

Abstract

Self-assembled monolayer (SAM) with tunable surface chemistry and smooth surface provides an approach to adhesion improvement and suppressing deleterious chemical interactions. Here, we demonstrate the SAM comprising of designed and synthesized 6-(3-triethoxysilylpropyl)amino-1,3,5-triazine-2,4-dithiol molecule, which can enhance interfacial adhesion to inhibit copper diffusion used in device metallization. The formation of the triazinedithiolsilane SAM is confirmed by X-ray photoelectron spectroscopy. The adhesion strength between SAM-coated substrate and electroless deposition copper film was up to 13.8 MPa. The design strategy of triazinedithiolsilane molecule is expected to open up the possibilities for replacing traditional organosilane to be applied in microelectronic industry.

Keywords:
adhesion; copper; diffusion barrier; self-assembled monolayer; surface chemistry