PZT films nano-embossing process and results of embossed profiles. (a) A schematic diagram illustrating a one-step embossing process to form a stagger shape in a ferroelectric PZT film with two different thicknesses. (b) AFM images of embossed stagger like profiles of ferroelectric PZT film.
Shen et al. Nanoscale Research Letters 2011 6:474 doi:10.1186/1556-276X-6-474