Figure 6.

SEM micrographs. (a, b, c) micro- and nano-sized patterns on master Si mold, (d, e, f) replicated micro- and nano-sized patterns on fluorinated polymer-coated flexible PET film by hot embossing lithography.

Shin et al. Nanoscale Research Letters 2011 6:458   doi:10.1186/1556-276X-6-458
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